Abstract The reactivity of prospective capping layer extreme ultraviolet (EUV) mirror materials with hydrocarbons, alcohols, and water is studied in the gas phase using mass spectroscopy of metal-oxide clusters. We report the results of chemistry studies for Si, Ti, Hf, Zr, and Ru metal oxide nanoclusters in which the reaction products were ionized with little or no fragmentation by 26.5 eV photons from a desktop size 46.9 nm Ne-like Ar laser. Hf and Zr oxides are found to be much less reactive than Si or Ti oxides in the presence soft x-ray light. Ru oxides show different chemistry and are inactive with water/alcohols, and active with saturated/unsaturated hydrocarbons.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Gas Phase Study of The Reactivity of Optical Coating Materials with Hydrocarbons Using a Compact Soft X-Ray Laser


    Beteiligte:
    Heinbuch, S. (Autor:in) / Dong, F. (Autor:in) / Bernstein, E. R. (Autor:in) / Rocca, J. J. (Autor:in)

    Erschienen in:

    X-Ray Lasers 2008 ; 7 ; 439-444


    Erscheinungsdatum :

    2009-01-01


    Format / Umfang :

    6 pages





    Medientyp :

    Aufsatz/Kapitel (Buch)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




    Gas Phase Study of The Reactivity of Optical Coating Materials with Hydrocarbons Using a Compact Soft X-Ray Laser

    Heinbuch, S. / Dong, F. / Bernstein, E.R. et al. | British Library Conference Proceedings | 2009


    Compact soft x-ray laser pumped by a pulse-train laser

    Ande, K. / Hara, T. / Aoyagi, Y. et al. | IEEE | 1995


    Process Optimisation in Laser De-coating of Compact Disks

    Uhlmann, E. / Elbing, F. / Huhns, T. et al. | British Library Conference Proceedings | 2001


    Compact soft x-ray laser pumped by a pulse-train laser [2520-24]

    Hara, T. T. / Aoyama, M. / Ando, K. et al. | British Library Conference Proceedings | 1995


    Compact Phase Detector for Optical-Microwave Synchronization Using Polarization Modulation

    Wei, J. / Zhang, S. / Kim, J. et al. | British Library Online Contents | 2018