Abstract The reactivity of prospective capping layer extreme ultraviolet (EUV) mirror materials with hydrocarbons, alcohols, and water is studied in the gas phase using mass spectroscopy of metal-oxide clusters. We report the results of chemistry studies for Si, Ti, Hf, Zr, and Ru metal oxide nanoclusters in which the reaction products were ionized with little or no fragmentation by 26.5 eV photons from a desktop size 46.9 nm Ne-like Ar laser. Hf and Zr oxides are found to be much less reactive than Si or Ti oxides in the presence soft x-ray light. Ru oxides show different chemistry and are inactive with water/alcohols, and active with saturated/unsaturated hydrocarbons.
Gas Phase Study of The Reactivity of Optical Coating Materials with Hydrocarbons Using a Compact Soft X-Ray Laser
2009-01-01
6 pages
Aufsatz/Kapitel (Buch)
Elektronische Ressource
Englisch
Neutral Cluster , Hafnium Oxide , Single Photon Ionization , Major Reaction Channel , Metal Oxide Nanoclusters Physics , Optics and Electrodynamics , Atomic, Molecular, Optical and Plasma Physics , Quantum Optics , Laser Technology, Photonics , Atoms and Molecules in Strong Fields, Laser Matter Interaction , Plasma Physics
British Library Conference Proceedings | 2009
|Compact soft x-ray laser pumped by a pulse-train laser
IEEE | 1995
|Process Optimisation in Laser De-coating of Compact Disks
British Library Conference Proceedings | 2001
|Compact soft x-ray laser pumped by a pulse-train laser [2520-24]
British Library Conference Proceedings | 1995
|Compact Phase Detector for Optical-Microwave Synchronization Using Polarization Modulation
British Library Online Contents | 2018
|