Spectroscopic ellipsometry is demonstrated to be extremely sensitive to contamination layers in the thickness range from 0.1 nm to 10 microns. In the present experiments we deposit either a thin lubricating oil (WD-40) or mineral oil continuously onto Ir, Cu, Al, Au, and V substrates from a bubbler, and monitor its thickness growth from sub-nanometer to tens of nanometers as a function of time. Re-evaporation of contaminant oils is also monitored in real-time by ellipsometry.


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    Titel :

    Spectroscopic ellipsometry as a sensitive monitor of materials contamination


    Beteiligte:
    Hale, Jeffrey S. (Autor:in) / Hilfiker, James N. (Autor:in) / Spady, Blaine (Autor:in) / Synowicki, R. (Autor:in) / Woollam, John A. (Autor:in)


    Erscheinungsdatum :

    1995-03-01


    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Keine Angabe


    Sprache :

    Englisch





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