Valve modification provides two operating modes fully open and small, precise leak. Copper insert with radially oriented holes allows small, controllable, precise effusion rate when valve closed or nearly unobstructed flow when valve open. Numerous applications in surface physics, vacuum physics, materials science, gas kinetics, thin films, and other areas of research requiring measured flows of gas into or out of system.


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    Titel :

    Precise-Conductance Valve Insert


    Beteiligte:
    Outlaw, R. A. (Autor:in) / Hoyt, R. F. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    1986-06-01



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :


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