Sputtering Ion Source, Third Phase Final Report, 29 Mar. - 30 Sep. 1963
1963
33 pages
Report
Keine Angabe
Englisch
Physics , Duoplasmatron , Ion source , Power supply , Solids , Sputtering , Alloy , Argon , Bombardment , Gas , Ion , Ionization , Noble , Optics , Power , Source , Spectrum , Supply , Zirconium