We report sub-140 nm resolution imaging with 46.9 nm radiation from a compact capillary-discharge laser. This result was obtained using a combination of a Sc/Si multilayer-coated Schwarzschild condenser and free-standing imaging zone plate.
Nano-scale imaging with a compact EUV laser
2005 Quantum Electronics and Laser Science Conference ; 3 ; 1953-1955 vol. 3
2005-01-01
1334943 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Compact laser sources for laser designation, ranging and active imaging [6552-15]
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