Etched-mesa micro-disk resonant photo-detector heterogeneously integrated to Si-wire waveguide by oxide-to-oxide bonding has been proposed and analyzed by 3D-FDTD simulation. The 3um-, 5um- and 8um-diameter devices give free-spectral-ranges of 9.4THz, 5.8THz and 3.3THz, respectively. 3¿m- and 5¿m-diameter photo-detector potentially can give bandwidths better than 100GHz.
High-Speed Resonant Microdisk Photodetectors Heterogeneouly Integrated to Si-Wire Waveguide
2008-12-01
348904 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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