We have been developing a high repetition (5 kHz) and high power (5 kW) Nd:YAG laser system for EUV lithography. Key subjects are (1) reliable front-end, (2) uniform and high density pumping of main amplifier rods, and (3) compensation of thermal effects. Fairly good uniformity was achieved by adjusting pumping geometry. Detail system analysis suggests that 8 amplifier modules pumped at 24.0 kW power are required to get output of 5 kW under relatively small thermal effects.


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    Titel :

    High power and high repetition Nd:YAG laser pumped by cw LDs


    Beteiligte:
    Fujita, H. (Autor:in) / Nakatsuka, M. (Autor:in) / Mitra, A. (Autor:in) / Wang, T. (Autor:in) / Tsubakimoto, K. (Autor:in) / Fijimoto, Y. (Autor:in) / Yoshida, H. (Autor:in) / Miyanaga, N. (Autor:in) / Izawa, Y. (Autor:in) / Matsuoka, S. (Autor:in)


    Erscheinungsdatum :

    2005-01-01


    Format / Umfang :

    622059 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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