We have been developing a high repetition (5 kHz) and high power (5 kW) Nd: YAG laser system pumped by cw LDs for EUV lithography. Design concepts and experimental results will be reported.


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    Titel :

    High Power and High Repetition Nd: YAG Laser Pumped by cw Laser Diodes


    Beteiligte:
    Fujita, H. (Autor:in) / Nakatsuka, M. (Autor:in) / Tao Wang, (Autor:in) / Tsubakimoto, K. (Autor:in) / Fujimoto, Y. (Autor:in) / Yoshida, H. (Autor:in) / Miyanaga, N. (Autor:in) / Izawa, Y. (Autor:in) / Matsuoka, S. (Autor:in) / Kubomura, H. (Autor:in)


    Erscheinungsdatum :

    2005-01-01


    Format / Umfang :

    885287 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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