We have been developing a high repetition (5 kHz) and high power (5 kW) Nd: YAG laser system pumped by cw LDs for EUV lithography. Design concepts and experimental results will be reported.
High Power and High Repetition Nd: YAG Laser Pumped by cw Laser Diodes
2005-01-01
885287 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Laser-Diode End-Pumped High-Repetition Frequency Laser Operating at 1.34 μm
British Library Online Contents | 2015
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