This paper describes the design, test and qualification of MEMS optical switches developed at Umachines, Inc. The mirror monolithically integrated with MEMS actuator is driven by electromagnetic force and is perpendicular to light path during movement. Low voltage (< 1V) and low current (<10 mA) requirement of the MEMS actuators simplifies the control electronic circuits. Fully packaged 2/spl times/2 add/drop switches have passed rigorous Telcordia/sup /spl trade// GR-1221.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Design, test and qualification of stiction-free MEMS optical switches


    Beteiligte:
    Su, G.-D.J. (Autor:in) / Jiang, F. (Autor:in) / Chiu, E. (Autor:in) / Avakian, A. (Autor:in) / Dickson, J. (Autor:in) / Jia, D. (Autor:in) / Tsao, T. (Autor:in)


    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    89858 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Design, test and qualification of stiction-free MEMS optical switches

    Su, G.-D. J. / Jiang, F. / Chiu, E. et al. | British Library Conference Proceedings | 2003


    MEMS optical switches

    Li Fan, / Husain, A. / Dobblelaere, P.D. et al. | IEEE | 2001


    MA3 MEMS Optical Switches

    IEEE | British Library Conference Proceedings | 2001


    Physical-Parameter Design in 2-D MEMS Optical Switches

    Savastano, L. / Maier, G. / Pattavina, A. et al. | British Library Online Contents | 2005


    Architectural Design for Multistage 2-D MEMS Optical Switches

    Shen, G. / Cheng, T. H. / Bose, S. K. et al. | British Library Online Contents | 2002