Successful two-step X-ray lithography (LIGA) process is demonstrated for the first time for the application to millimeter and submillimeter wave vacuum devices. The experiment of the two-step LIGA-fabricated folded waveguide BWO with a 12kV electron gun using thermionic cathodes and cold cathodes using carbon nanotubes are being investigated at the frequency of 0.1THz.
Experimental Investigation of Micro-fabricated Folded Waveguide Backward Wave Oscillator for Submillimeter Application
2006-09-01
1094073 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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