This paper addresses an innovative optical scheme to detect ultrafine motions of micromechanical structures, as a generic design for a whole class of sensors including accelerometers, gyroscopes, position sensors, etc.. We fabricated a monolithically integrated micromechanic optic sensor (MIMOS) on a Si substrate. The device consists of two superimposing gratings with a small angle and an array of photodetectors.
A generic monolithically integrated micromechanic optic sensor (MIMOS)
1996-01-01
272047 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
A Generic Monolithically Integrated Micromechanic Optic Sensor (MIMOS)
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