This paper addresses an innovative optical scheme to detect ultrafine motions of micromechanical structures, as a generic design for a whole class of sensors including accelerometers, gyroscopes, position sensors, etc.. We fabricated a monolithically integrated micromechanic optic sensor (MIMOS) on a Si substrate. The device consists of two superimposing gratings with a small angle and an array of photodetectors.


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    Titel :

    A generic monolithically integrated micromechanic optic sensor (MIMOS)


    Beteiligte:
    Tran, A.T.T.D. (Autor:in) / Lee, J.J. (Autor:in) / Zhang, K. (Autor:in) / Lo, Y.H. (Autor:in)


    Erscheinungsdatum :

    1996-01-01


    Format / Umfang :

    272047 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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