A semiconductor processing system includes a first semiconductor processing site and a second semiconductor processing site. The system includes an unmanned electric vehicle configured to carry a portable cleanroom stocker between the first and second semiconductor processing sites. The portable cleanroom stocker is configured to maintain cleanroom conditions within the portable cleanroom stocker during transportation.


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    Titel :

    SYSTEM AND METHOD FOR MEASURING MAGNETIC FIELDS IN PVD SYSTEM


    Beteiligte:
    LIN MEI-HSUAN (Autor:in) / FAN RONG SYUAN (Autor:in) / CHANG JEN-YUAN (Autor:in)

    Erscheinungsdatum :

    2023-12-07


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B60L PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES , Antrieb von elektrisch angetriebenen Fahrzeugen



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