An electromagnetic valve as a fluid device is provided with a valve seat and a valve body midway of a flow path where a liquid flows, and closes the valve with the valve body pressed onto the valve seat and opens the valve by causing a gap between the valve seat and the valve body. The electromagnetic valve includes, as electrodes for measuring a degree of electrical conductivity between a liquid on an upstream side and a liquid on a downstream side of the valve seat and the valve body in the flow path, a first electrode electrically conductive to the liquid on the upstream side and a second electrode electrically conductive to the liquid on the downstream side. By using the first and second electrodes, detection of liquid leakage can be easily performed.
Fluid device
2021-09-07
Patent
Elektronische Ressource
Englisch