Aspects of the invention provide methods and systems for moving moveable stages relative to a stator. A stator is operationally divided into multiple stator tiles. The movement of the one or more moveable stages is controlled by a plurality of controllers (each assigned particular control responsibilities). A controller is provided for each stator sector, where each stator sector comprises a group of one or more stator tiles. Controllers from neighboring sectors share various information to facilitate controllable movement of one or more moveable stages relative to the stator.


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    Titel :

    Methods and systems for controllably moving one or more moveable stages in a displacement device


    Beteiligte:
    LU XIAODONG (Autor:in)

    Erscheinungsdatum :

    2020-09-01


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    B61C Lokomotiven , LOCOMOTIVES / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / H02K Dynamoelektrische Maschinen , DYNAMO-ELECTRIC MACHINES / H02P CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS , Steuern oder Regeln von elektrischen Motoren, elektrischen Generatoren, dynamoelektrischen Umformern



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