The invention relates to a vibration isolation system (VIS) comprising: —a base (10); —a coupling element (20) to be coupled to a vibration sensitive object; —a vibration isolator (30-34) arranged between the base and the coupling element; —a bellows (50) to be arranged between the VIS coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; and —one or more separate damping elements to act on convolutions of the bellows.
Vibration isolation system and lithographic apparatus
2020-01-28
Patent
Elektronische Ressource
Englisch
IPC: | G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM , Geräte oder Anordnungen zum Aufnehmen, Projizieren oder Betrachten von Fotografien / B64C AEROPLANES , Flugzeuge / F16F SPRINGS , Federn / F16J Kolben , PISTONS / G03F Fotomechanische Herstellung strukturierter oder gemusterter Oberflächen, z.B. zum Drucken, zum Herstellen von Halbleiterbauelementen , PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES |