A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to, form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.


    Zugriff

    Download


    Exportieren, teilen und zitieren



    Titel :

    Substrate transport vacuum platform


    Beteiligte:

    Erscheinungsdatum :

    2019-12-10


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    B66C Krane , CRANES / B25J Manipulatoren , MANIPULATORS / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



    Substrate transport vacuum platform

    HOFMEISTER CHRISTOPHER / HOSEK MARTIN | Europäisches Patentamt | 2019

    Freier Zugriff

    TRANSPORT PLATFORM

    SOUSA VAZQUEZ JOSE ALFONSO | Europäisches Patentamt | 2022

    Freier Zugriff

    TRANSPORT PLATFORM

    SOUSA VAZQUEZ JOSE ALFONSO | Europäisches Patentamt | 2017

    Freier Zugriff

    TRANSPORT PLATFORM

    SOUZA VAZKES KHOSE ALFONSO | Europäisches Patentamt | 2021

    Freier Zugriff

    TRANSPORT PLATFORM

    BASAVIN GARRI EGONOVICH / EGUNOV SERGEJ VLADIMIROVICH / LOVUSHKIN VLADIMIR ALEKSEEVICH et al. | Europäisches Patentamt | 2016

    Freier Zugriff