플라스마 발생기는 무선 주파수 전원, 동축 공동 공진기 조립체 및 직류 전원을 포함한다. 무선 주파수 전원은 전력/전압의 제 1 비율을 갖는 무선 주파수 전력의 전압 제공을 제공한다. 공진기 조립체는 무선 주파수 전원에 결합된 중심 도체를 포함하며 또한 가상 단락 회로를 포함한다. 직류 전원은 가상 단락 회로의 중심 도체에 연결되며 제 1 비율보다 작은 전력/전압의 제 2 비율을 갖는 직류 전력의 전압 제공을 제공한다.
A plasma generator comprises a radio frequency power source, a coaxial cavity resonator assembly, and a direct current power source. The radio frequency power source provides a voltage supply of radio frequency power having a first ratio of power over voltage. The resonator assembly includes a center conductor coupled to the radio frequency power source, and also includes a virtual short circuit. The direct current power source is connected to the center conductor at the virtual short circuit, and provides a voltage supply of direct current power having a second ratio of power over voltage that is less than the first ratio.
DUAL SIGNAL COAXIAL CAVITY RESONATOR PLASMA GENERATION
이중 신호 동축 공동 공진기 플라스마 발생
2016-12-19
Patent
Elektronische Ressource
Koreanisch
IPC: | H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / B60K Anordnung oder Einbau von Antriebseinheiten oder von Kraft- bzw. Drehmomentübertragungen in Fahrzeugen , ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES / F02P IGNITION, OTHER THAN COMPRESSION IGNITION, FOR INTERNAL-COMBUSTION ENGINES , Zündung von Brennkraftmaschinen mit innerer Verbrennung, ausgenommen Kompressionszündung / H01T SPARK GAPS , Funkenstrecken / H05H Plasmatechnik , PLASMA TECHNIQUE |
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