The invention provides a magnetron sputtering target material preparation method and a magnetron sputtering target material processing and transferring device, and relates to the technical field of sputtering target materials, and the magnetron sputtering target material preparation method is characterized in that raw materials are fully mixed through a vacuum induction melting furnace, and then casting, machining and copper plate coating are performed; the magnetron sputtering target material processing and transferring device comprises a frame and a workbench, the appearance of the frame is a cuboid, wheels are arranged on the two sides of the frame, the lower end face of the workbench is movably connected with the frame through a lifting frame, the magnetron sputtering target material processing and transferring device is characterized by further comprising a mechanical arm, and a sliding rail is arranged below the mechanical arm; the lower end face of the sliding rail is provided with a fixing bolt fixedly connected with the workbench, the mounting base is slidably connected with the moving base, rotating motors are symmetrically arranged on the two sides of the fixed arm, and mechanical arm rods are arranged on the inner sides of the rotating motors. The method has the advantages that the product resistivity is high, the resistivity temperature coefficient is low, the device carrying efficiency is high, and meanwhile, the method can adapt to different procedures.
本发明提供的一种磁控溅射靶材制备方法及其加工转运装置,涉及溅射靶材技术领域,其特征在于,通过真空感应熔炼炉将原料进行充分混合,然后通过浇铸、机加工与铜板包覆;一种磁控溅射靶材加工转运装置包括车架和工作台,所述车架的外形为长方体,且两侧带有车轮,所述工作台的下端面通过升降架与车架活动连接,其特征在于,还包括机械手,所述机械手的下方带有滑轨,所述滑轨的下端面带有固定螺栓与工作台固定连接,所述安装座与移动座滑动连接,所述固定臂的两侧对称设有旋转电机,所述旋转电机的内侧带有机械臂杆。本发明的优点:产品电阻率高,电阻率温度系数低,装置搬运效率高,同时可以适应不同工序。
Magnetron sputtering target material preparation method and magnetron sputtering target material processing and transferring device
一种磁控溅射靶材制备方法及其加工转运装置
2023-11-14
Patent
Elektronische Ressource
Chinesisch
IPC: | B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B22C FOUNDRY MOULDING , Gießformen / B25J Manipulatoren , MANIPULATORS / B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS / C22C Legierungen , ALLOYS / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL |
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