The invention discloses a thin film for a folding charging pile flexible electronic device and a preparation method and application thereof. The preparation method comprises the following steps: (1) ultrasonically cleaning a silicon wafer with the surface crystallographic direction of (110) in acetone, ethanol and deionized water; (2) the silicon wafer is placed in a sample sending chamber of radio frequency magnetron sputtering equipment and vacuumized, and residual water vapor on the surface of the silicon wafer is removed; (3) the Cr22Co19Ni17Fe19Mn23 alloy target material is placed in a sputtering cavity for pre-sputtering, and oxide and dirt on the surface of the target material are removed; (4) sending the silicon wafer to a sample table in the sputtering cavity, adjusting the sample table to rotate, and enabling the silicon wafer to rotate along with the sample table; (5) setting sputtering voltage, working pressure, sputtering time, sputtering distance, argon flow, vacuum degree of a sputtering cavity and sputtering; and (6) after sputtering is completed, annealing and cooling the sample along with the cavity, and taking out the sample to obtain the thin film for the folding charging pile flexible electronic device. According to the application, the prepared thin film is applied to a folding type charging pile electronic device which can be subjected to alternating load and bending deformation. The preparation method disclosed by the invention is simple to operate and can be used for batch production, and the prepared film has high toughness and has a wide application prospect in the field of folding type charging pile flexible electronic devices.
本发明公开一种折叠式充电桩柔性电子器件用薄膜及制备方法与应用。制备:(1)将表面结晶学方向为(110)的硅片在丙酮、乙醇和去离子水中超声清洗;(2)将硅片置于射频磁控溅射设备送样室中并抽真空,并去除硅片表面残留的水汽;(3)将Cr22Co19Ni17Fe19Mn23合金靶材置于溅射腔预溅射,清除靶材表面的氧化物和污垢;(4)将硅片送到溅射腔中样品台,调节样品台旋转,硅片随样品台一起转动;(5)设置溅射电压、工作压力、溅射时间、溅射距离、氩气流量、溅射腔的真空度,溅射;(6)溅射完成后样品随腔体退火冷却取出试样,得到折叠式充电桩柔性电子器件用薄膜。应用:将制得的薄膜用于会受到交变载荷和弯曲变形的折叠式充电桩电子器件中。本发明的制备方法操作简单可以批量化生产,制备的薄膜具有高的韧性,在折叠式充电桩柔性电子器件领域有广阔应用前景。
Thin film for flexible electronic device of folding type charging pile and preparation method and application of thin film
一种折叠式充电桩柔性电子器件用薄膜及制备方法与应用
2023-03-28
Patent
Elektronische Ressource
Chinesisch
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