A low cost angular rate sensor in si-surface micromachining technology for automotive application
Ein preiswerter Winkelsensor in Feinstbearbeitungstechnik der Si-Oberflaeche fuer kraftfahrzeugtechnische Anwendung.
1999
5 pages
SAE-Paper;1999-01-0931;1999;Sensors and Actuators 1999;SAE Spec.Publ.; SP-1443
Sonstige
Englisch
A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application
SAE Technical Papers | 1999
|A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application
British Library Conference Proceedings | 1999
|Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications
British Library Conference Proceedings | 1998
|Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications
British Library Conference Proceedings | 1998
|Angular Rate Sensor for Automotive Application
British Library Conference Proceedings | 1995
|