This work reports on a unique tactile microprobe based on a parallelogram kinematic made from monocrystalline silicon. This kinematic, made out of an orthogonal cascade assembly of three identical parallelograms, provides an isotropic behavior to the microprobe. Each parallelogram deflects in only one direction thanks to thin elastic silicon membrane hinges and their displacements are recognized using piezoresistors integrated into these hinges. Wide deflection ranges, isotropic behavior and low mechanical stiffness of the new microprobe, as predicted by simulations, could be verified in experiments. The fabrication, the assembly and the contacting of the first microprobe prototype was optimized to allow very compact integration into a Ø11 mm housing. This make it suitable for metrology research laboratories as well as industries equipped with conventional coordinate measurement machines and even for a variety of other 3D force/displacement measurements.


    Zugriff

    Download


    Exportieren, teilen und zitieren



    Titel :

    3-D Isotropic Tactile Microprobe Based on a Silicon Parallelogram Kinematic: From Concept to Fabrication


    Beteiligte:
    Metz, David (Autor:in) / Dietzel, Andreas (Autor:in)

    Erscheinungsdatum :

    2018-01-01


    Anmerkungen:

    Journal of Microelectromechanical Systems, IEEE, 10.1109/JMEMS.2018.2877926, S. 1 - 14 -- 1941-0158 -- 1057-7157



    Medientyp :

    Aufsatz (Zeitschrift)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Klassifikation :

    DDC:    6 / 62 / 620 / 629



    Kinematic Analysis of a Planar Manipulator with Anti-parallelogram Joints and Offsets

    Wenger, Philippe / Furet, Matthieu | Springer Verlag | 2020


    PARALLELOGRAM ARM VEHICLE LIFT

    BETTCHER ROBERT E III / KLINE JUSTIN M / METZGER AUSTIN D et al. | Europäisches Patentamt | 2022

    Freier Zugriff


    Storage crane based on parallelogram mechanism

    ZHANG MIN / JIANG XI / FAN XINGZHI et al. | Europäisches Patentamt | 2020

    Freier Zugriff

    Parallelogram arm vehicle lift

    BETTCHER III ROBERT E / KLINE JUSTIN M / METZGER AUSTIN D et al. | Europäisches Patentamt | 2019

    Freier Zugriff