High-Q Photonic Crystal Nanocavities on 300 mm SOI Substrate Fabricated With 193 nm Immersion Lithography
JOURNAL OF LIGHTWAVE TECHNOLOGY ; 32 , 8 ; 1457,1462
2014-01-01
2 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 621.3692 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Photonic Crystal with Diamond-like Structure Fabricated by Holographic Lithography
British Library Conference Proceedings | 2005
|