Developing of a 3-D Tomography Imaging Technique for Non-Destructive Inspection of MEMS Structures with 60-nm Resolution
INTERNATIONAL CONFERENCE, Optical MEMS and their applications ; 2004 ; Takamatsu, Japan
2004-01-01
2 pages
Aufsatz (Konferenz)
Englisch
Optical MEMS , IEEE , LEOS
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