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    Titel :

    Developing of a 3-D Tomography Imaging Technique for Non-Destructive Inspection of MEMS Structures with 60-nm Resolution


    Beteiligte:
    Ko, C.-H. (Autor:in) / Tang, M.-T. (Autor:in) / Lee, T.-H. (Autor:in) / Yin, G.-C. (Autor:in) / Song, Y.-F. (Autor:in) / Lin, H.-M. (Autor:in) / Liang, K. S. (Autor:in) / Yun, W. (Autor:in) / IEEE / LEOS

    Kongress:

    INTERNATIONAL CONFERENCE, Optical MEMS and their applications ; 2004 ; Takamatsu, Japan



    Erscheinungsdatum :

    2004-01-01


    Format / Umfang :

    2 pages


    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch


    Schlagwörter :


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