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    Titel :

    Silicon Based Vibration Sensors For Microelectromechanical Systems



    Kongress:

    9th, International Conference on Smart Materials, Structures and Systems ; 1999 ; Bangalore, India



    Erscheinungsdatum :

    1999-01-01


    Format / Umfang :

    6 pages


    Anmerkungen:

    in conjunction with the ninth National Seminar on Aerospace Structures; Includes bibliographical references and index



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch





    MicroElectroMechanical Systems

    Gabriel, K. J. / Association for Unmanned Vehicle Systems International | British Library Conference Proceedings | 1997


    MicroElectroMechanical Systems (MEMS)

    Gabriel, K. J. / IEEE; Aerospace and Electronics Systems Society | British Library Conference Proceedings | 1997


    Optical Microelectromechanical Systems (OMEMS) Based on Silicon-on-Insulator (SOI) Technology

    Noell, W. / Clerc, P.-A. / Guldimann, B. et al. | British Library Conference Proceedings | 2002