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    Titel :

    Interferometry system for out-of-plane displacements and microshape measurements of silicon membranes [5124-39]



    Kongress:

    Conference; 7th, Optoelectronic and electronic sensors ; 2002 ; Rzeszow, Poland



    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    5 pages


    Anmerkungen:

    Also known as OES 2002




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Noncontact multiband emissivity measurements [5124-42]

    Mazikowski, A. / International Society of Optical Engineering / Polish Society for Sensor Technique | British Library Conference Proceedings | 2003


    Nr. 5124

    DataCite | 1943


    Interferometric dimension comparator [5124-43]

    Iwasinska, O. / Dobosz, M. / International Society of Optical Engineering et al. | British Library Conference Proceedings | 2003


    Silicon katarometer with the BSC-type contacts [5124-24]

    Lysko, J. M. / Lozinko, J. / Jazwinski, J. et al. | British Library Conference Proceedings | 2003


    Platinum-black coatings for infrared emitters [5124-17]

    Jasek, K. / Puton, J. / Siodlowski, B. et al. | British Library Conference Proceedings | 2003