A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application
Session, Sensors and actuators ; 1999 ; Detroit; MI
1999-01-01
6 pages
Contains paper nos 1999-01-0931 to 1999-01-1044 with gaps. Held as part of the SAE international congress
Aufsatz (Konferenz)
Englisch
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A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application
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