Optical Correlation Technique for Measurement of Roughness at Microfacets of Reflection-type Diffraction Gratings [3573-83]
Congress; 5th, Modern optics ; 1998 ; Budapest
1998-01-01
3 pages
Also known as OPTIKA '98
Aufsatz (Konferenz)
Englisch
modern optics , OPTIKA , HUNGOPTIKA , SPIE
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