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    Titel :

    Development of Released Micromachined Structures for Millimeter Device Applications: Preliminary Results



    Kongress:

    Aerospace conference ; 1998 ; Snowmass; CO



    Erscheinungsdatum :

    1998-01-01


    Format / Umfang :

    7 pages


    Anmerkungen:

    IEEE cat no 98TH8339




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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