Stress diagnostics in the plates of semiconductor crystals by means of light polarization modulation [2113-23]
International workshop, Optical diagnostics of materials and devices for opto-, micro-, and quantum electronics ; 1993 ; Kiev
Optical diagnostics of materials and devices for opto-, micro-, and quantum electronics ; 2113 ; 140-145
1994-01-01
6 pages
Aufsatz (Konferenz)
Englisch
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